This workshop is open to all those people working in industry and academia, with
an interest in recent progress in research and development, plus future trends in the
fabrication and application of micro & nano structures and devices.
Key plasma processing solutions to produce WBG RF and Power devices
Dr Andrew Newton, Oxford Instruments Plasma Technology
Cryo- and Bosch-DRIE Processes for Demanding Top-down Approaches in
MEMS Fabrication/ Dry Etching for MEMS applications
Mark McNie, Oxford Instruments Plasma Technology