アプリケーション

Automotive Sensors

関連: 自動車・航空宇宙

MEMSファブリケーション、構造特性評価

MEMS is enabling a new generation of detectors allowing efficient measurement in for example motion sensing which is used in safety-critical systems as well as to enable autonomous vehicles. We provide processes and tools needed to manufacture advanced MEMS sensors as well as characterise them.

Process solutions for MEMS and Sensors

 

Plasma Process Solutions for Laser Applications Plasma Process Solutions for MEMS and Sensor Applications

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